Measuring Machines for Microstructures

Tolerance ranges of only several micrometers are required in micromechanics and for certain parts produced in the automotive, tool manufacturing and machine tool building industries. Especially accurate coordinate measuring machines are required in order to enable the measurement of such objects with sufficient precision and low uncertainty. Their basic design corresponds to that of the air bearing coordinate measuring machines with a fixed bridge described above. Suitable components such as high-resolution measuring scale systems (resolution = 10 nm), special air bearings with a low natural vibration (< 20 nm amplitude) and special design measures to reduce the friction within the system enable measuring uncertainties of well below 1 µm (see Fig. 53, p. 79). This extreme accuracy can be achieved only by using image processing sensors and fiber probes.