Conventional tactile sensors have in common that the signal is transmitted from the stylus via a rigid shaft to the actual sensor (switch, piezo element). As any deflection of the stylus has an effect on the measurement result, efforts are made to use styli that are as rigid as possible. In conjunction with the sensors used, this leads to relatively large dimensions and probing forces (see p. 102 ff. Probing force). In practice, the lower limit for the stylus diameter is a few 0.1 mm and for the probing force approx. 10 mN. Such touch probes are therefore only suitable to a limited extent for measuring small or sensitive geometric features. Even reducing the size while retaining the principle does not solve these problems, which is why such microprobes have not become established in practice.
 Development

Machines
 Coordinate measuring machines with XY table
 Coordinate measuring machines with guideways in a single plane
 Coordinate measuring machines with bridge
 Coordinate measuring machines with rotary axes
 Coordinate measuring machines for twodimensional measurements
 Coordinate measuring machines with Xray tomography
 Coordinate measuring machines for special applications
 Sensors
 Software
 Special characteristics
 Accuracy
 Publications
 Literature page